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发表刊物:Journal of Microelectromechanical Systems
第一作者:C. Tu
论文类型:Article
通讯作者:J. Lee
论文编号:WOS: 000317191700004
卷号:22
期号:2
页面范围:262-264
ISSN号:1057-7157
是否译文:否
发表时间:2013-04-01
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