Doctor of Engineering
With Certificate of Graduation for Doctorate Study
Gender:Male
Date of Employment:2005-04-01
E-Mail:2dfae7fbc3b4eee77cbc83e6dc0991c98a03764bcc68440b36c566a8436e2ae8a1583db720d39738c58ecf51abdfc0792241b0c642189c27038028cf0502664fcf2ad60fb7a8e4099e84c7a18122e783ed3307500b5c9fbe19c3e89a1d71dd219103fa75b78e4c54f92297151d3fe6fc58621daf6a763c7e396f0951bd7581e1
Email:c045ee02cf98f3c8badd036e7bb5177b47f43a3c5e8068fdb1fbaf5b1a2b1c379d52673dfd4418a27d6de7464b5824033fcc7853b02961697e9d54402740773f73b957f231b409a9b1301b36a226460ea4a21a697903124a28bd1e0b5beb7fc196c290c4a3c04f9e1afef461deb669e658a79d928965266b30d2529ad49f5d79
Affiliation of Author(s):[1]Univ Elect Sci & Technol China, Inst Informat & Mat, Sch Microelect & Solid State Elect, Chengdu 610054, Sichuan, Peoples R China
Journal:VACUUM
Key Words:soft magnetic thin film; rapid recurrent thermal annealing; nanocrystalline
Abstract:The rapid recurrent thermal annealing (RRTA) method has been used to crystallize-amorphous Co85.5Nb8.9Zr5.6 Soft magnetic thin films, which were fabricated by DC magnetron sputtering onto glass-ceramic substrates directly at room temperature. As a result, crystalline grains with diameter of about 10 nm were formed and a partiall nanocrystallization of the films was obtained. The soft magnetic properties of the Co-based nanocrystalline thin films were largely improved after RRTA. The resistivity is decreased by a quarter and the coercivity is also decreased. The magnetic and electrical properties were investigated using the RRTA method with varied parameters such as annealing temperature, annealing time and repeat cycle. The experimental results revealed that the RRTA is an effective method to control the magnetic and electrical properties of Co85.5Nb8.9Zr5.6 thin films. (C) 2004 Elsevier Ltd. All rights reserved.
Document Type:Article
Volume:77
Issue:2
Page Number:203-208
ISSN No.:0042-207X
Translation or Not:no
CN No.:21-1174/TB
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