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MEMS 压力传感器新型膜结构设计与优化

2022-12-28 Hits:

Journal:机械设计

All the Authors:张顺星,于慧君,彭倍

First Author:卢鹏

Correspondence Author:周吴*

Volume:39

Issue:3

Page Number:61-67

Translation or Not:no

Date of Publication:2022-03-23

Date of Publication:2022-03-23

Pre One:Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study

Next One:Investigation of the Contact Characteristics of Silicon–Gold in an Anodic Bonding Structure

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Degree:Doctor of Engineering E-Mail:

Recommended Ph.D.Supervisor 》

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