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Applying laser Doppler vibrometry to probe anchor losses in MEMS AlN-on-Si contour mode resonators

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Journal:Sensors and Actuators A: Physical

All the Authors:A. Frank,S. Michael,J. Stegner,U. Stehr,M. Hein

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000409149900020

Volume:263

Page Number:188-197

ISSN No.:0924-4247

Translation or Not:no

Date of Publication:2017-08-15

Date of Publication:2017-08-15

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