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Enhancing quality factor by etch holes in piezoelectric-on-silicon lateral mode resonators

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Journal:Sensors and Actuators A: Physical

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000401391600016

Volume:259

Page Number:144-151

ISSN No.:0924-4247

Translation or Not:no

Date of Publication:2017-06-01

Date of Publication:2017-06-01

Pre One:Applying laser Doppler vibrometry to probe anchor losses in MEMS AlN-on-Si contour mode resonators

Next One:Effects of Cryogenic Cooling on the Quality Factor of Lamb Wave Mode Aluminium Nitride Piezoelectric-on-Silicon MEMS Resonators

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