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Effects of Cryogenic Cooling on the Quality Factor of Lamb Wave Mode Aluminium Nitride Piezoelectric-on-Silicon MEMS Resonators

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Journal:Sensors and Actuators A: Physical

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000377324000002

Volume:244

Page Number:15-23

ISSN No.:0924-4247

Translation or Not:no

Date of Publication:2016-06-15

Date of Publication:2016-06-15

Pre One:Enhancing quality factor by etch holes in piezoelectric-on-silicon lateral mode resonators

Next One:VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes

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