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VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes

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Journal:Journal of Micromechanics and Microengineering

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000376175600013

Volume:26

Issue:6

ISSN No.:0960-1317

Translation or Not:no

Date of Publication:2016-06-30

Date of Publication:2016-06-30

Pre One:Effects of Cryogenic Cooling on the Quality Factor of Lamb Wave Mode Aluminium Nitride Piezoelectric-on-Silicon MEMS Resonators

Next One:A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators

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