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A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators

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Journal:Journal of Micromechanics and Microengineering

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000366862100023

Volume:25

Issue:11

ISSN No.:0960-1317

Translation or Not:no

Date of Publication:2015-10-01

Date of Publication:2015-10-01

Pre One:VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes

Next One:Differential-capacitive-input and differential-piezoresistive-output enhanced transduction of a silicon bulk-mode microelectromechanical resonator

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