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Differential-capacitive-input and differential-piezoresistive-output enhanced transduction of a silicon bulk-mode microelectromechanical resonator

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Journal:Sensors and Actuators A: Physical

All the Authors:H. Zhu,Y. Xu

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000334984300006

Volume:210

Page Number:41-50

ISSN No.:0924-4247

Translation or Not:no

Date of Publication:2014-04-01

Date of Publication:2014-04-01

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