Current position: Home > Scientific Research > Paper Publications
Paper Publications
Crystallographic effects on energy dissipation in high-Q silicon bulk mode resonators
2019-12-27 Hits:Journal:Journal of Microelectromechanical Systems
First Author:C. Tu
Indexed by:Article
Correspondence Author:J. Lee
Document Code:WOS: 000317191700004
Volume:22
Issue:2
Page Number:262-264
ISSN No.:1057-7157
Translation or Not:no
Date of Publication:2013-04-01
Date of Publication:2013-04-01