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Increased dissipation from distributed etch holes in a lateral breathing mode silicon micromechanical resonator

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Journal:Applied Physics Letters

First Author:C. Tu

Indexed by:Article

Correspondence Author:J. Lee

Document Code:WOS: 000306360600095

Volume:101

Issue:2

ISSN No.:0003-6951

Translation or Not:no

Date of Publication:2012-07-09

Date of Publication:2012-07-09

Pre One:Crystallographic effects on energy dissipation in high-Q silicon bulk mode resonators

Next One:Thermoelastic dissipation in etch-hole filled Lamé bulk-mode silicon microresonators

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