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Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

2020-09-14 Hits:

Journal:Sensors

All the Authors:J. Lee

First Author:C. Tu

Indexed by:Artical

Correspondence Author:X. Zhang

Document Code:WOS: 000569740000001

Volume:20

Issue:17

ISSN No.:1424-8220

Translation or Not:no

Date of Publication:2020-09-02

Date of Publication:2020-09-02

Pre One:Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

Next One:Mechanical-resonance-enhanced thin-film magnetoelectric heterostructures for magnetometers, mechanical antennas, tunable RF inductors, and filters

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