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Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

2022-09-20 Hits:

Journal:Research

All the Authors:M. Yang,Z. Zhang,X. Lv,L. Li

First Author:C. Tu

Indexed by:Article

Correspondence Author:X. Zhang

Document Code:WOS: 000844358000001

Issue:2022

ISSN No.:2096-5168

Translation or Not:no

Date of Publication:2022-08-31

Date of Publication:2022-08-31

Pre One:Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators

Next One:Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review

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