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上一条：Z. W. Xu, F. Z. Fang, Yongqi Fu, S. J. Zhang, T. Han, J. M. Li. Fabrication of Micro/Nano Structures using Focused Ion Beam Implantation and XeF2 Gas Assisted Etching. Journal of Micromechanics and Microengineering. 19, 054003 (2009).
下一条：R. Langford, Philipp M. Phaneauf, J Gierak, Yongqi Fu, Applications of FIB Micromachining. MRS Bulletin, Vol. 32, No. 5, 417-423 (May 2007).
