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发表刊物:Journal of Micromechanics and Microengineering
第一作者:C. Tu
论文类型:Article
通讯作者:J. Lee
论文编号:WOS: 000366862100023
卷号:25
期号:11
ISSN号:0960-1317
是否译文:否
发表时间:2015-10-01
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