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所属单位：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

发表刊物：High Power Laser and Particle Beams

关键字：terahertz, metal hole arrays, ultra-thin polyimide film, low refractive index

摘要：Several metal hole array（MHA） structures of different sizes and shapes in THz were designed. The detection sensitivity of the structures with ultra-thin and low refractive index polyimide films, was explored on a THz time-domain system. MHAs with different structures were fabricated with femtosecond micromachining technology, and the THz reflection spectra were measured by the THz time-domain system. By attaching an ultra-thin polyimide （10 μm） film to the MHA, an obvious blue-shift of reflective resonance peak was observed, which indicated a high sensitivity of MHA to low refractive index materials. This characteristic allows us to achieve MHA-based high-sensitive sensor at THz band.

文献类型：Journal article (JA)

卷号：25

期号：6

页面范围：1479-1482

ISSN号：1001-4322

是否译文：否

CN号：51-1311/O4