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Paper Publications

160. Z. W. Xu, F. Z. Fang, Yongqi Fu, S. J. Zhang, T. Han, J. M. Li. Fabrication of Micro/Nano Structures using Focused Ion Beam Implantation and XeF2 Gas Assisted Etching. Journal of Micromechanics and Microengineering. 19, 054003 (2009).

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Pre One:161. Z. W. Xu, F. Z. Fang, S. J. Zhang, X. D. Zhang, X. T. Hu, Y. Q. Fu, L. Li, Fabrication of micro DOE using micro tools shaped with focused ion beam, Optics Express, 18(8), 8025-8032 (2010).

Next One:159. Mohammad Yeakub Ali, Nguyen Phu Hung, and Fu Yongqi, A Review of Focused Ion Beam Sputtering. International Journal of Precision Engineering and Manufacturing, Vol. 11, No. 1, pp. 157-170 (2010).

Stephen Fu

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Degree:Doctor of Engineering Status:On the job E-Mail:

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