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Paper Publications

161. Z. W. Xu, F. Z. Fang, S. J. Zhang, X. D. Zhang, X. T. Hu, Y. Q. Fu, L. Li, Fabrication of micro DOE using micro tools shaped with focused ion beam, Optics Express, 18(8), 8025-8032 (2010).

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Pre One:162. F. Z. Fang, Z. W. Xu, X. T. Hu, C. T. Wang, X. G. Luo, Y. Q. Fu, CIRP Annals- Manufacturing Technology 59(5), 543–546 (2010).

Next One:160. Z. W. Xu, F. Z. Fang, Yongqi Fu, S. J. Zhang, T. Han, J. M. Li. Fabrication of Micro/Nano Structures using Focused Ion Beam Implantation and XeF2 Gas Assisted Etching. Journal of Micromechanics and Microengineering. 19, 054003 (2009).

Stephen Fu

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