[1] 2016.01-2018.12, NSFC-NSAF, Research on Fundamental Issues on influence of packaging effects on the stability of micro accelerometer, U1530132, ¥630,000, PI

[2] 2016.01-2018.12, NSFC，Research on startup drift mechanism of capacitive micro accelerometer, 51505068, ¥200,000, PI

[3] 2012.01-2015.12, NSFC, Edge of Chaos and its Positive Control and Negative Control Method in Motion of Mechanism, 51175437, ¥600,000, Co-PI

[4] 2015.01-2017.12, 2011.12-2013.12, FRFCU UESTC, High precise MEMS resonant pressure sensors, ¥1,000,000, Co-PI

[5] 2014.06-2016.12, AVIC CAIC, Design and fabrication of high precise pressure sensors, ¥2,400,000, Co-PI

[6] 2012.04-2014.12, CAEP, Research on startup drift mechanism of comb micro accelerometer, ¥970,000, PI

[7] 2012.01-2013.12, KEY LAB  NUIST, Research on the size effects and thermal effects of micro humidity sensors, ¥20,000, PI

[8] 2011.12-2013.12, FRFCU UESTC, Research on the systematical prediction of microfabrication error, ¥70,000, PI

[9] 2011.04-2011.09, CAEP, Research on buckling mechanism and its influence on micro accelerometer, ¥60,000, PI