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Drift of MEMS Closed-Loop Accelerometers Induced by Dielectric Charging
2022-12-28 Hits:Journal:IEEE Transactions on Instrumentation and Measurement
All the Authors:Xiaoping He,Huijun Yu,Longqi Ran
First Author:Jiangbo He
Correspondence Author:Wu Zhou*
Document Code:7503707
Volume:70
Page Number:7503707
Translation or Not:no
Date of Publication:2021-08-03
Date of Publication:2021-08-03
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