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存在初始位移的MEMS 振动台的振动特性分析

2022-12-28 Hits:

Journal:仪器仪表学报

All the Authors:彭倍

First Author:郝瑞

Correspondence Author:周吴*

Volume:42

Issue:11

Page Number:71-78

Translation or Not:no

Date of Publication:2021-11-10

Date of Publication:2021-11-10

Pre One:A Piezoelectric Microultrasonic Motor With High Q and Good Mode Match

Next One:微机电系统压电振动台迟滞补偿方法研究

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:On the job School/Department:University of Electronic Science and Technology of China E-Mail:

Recommended Ph.D.Supervisor 》

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