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An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator

2023-10-06 Hits:

Affiliation of Author(s):University of Electronic Science and Technology of China

Teaching and Research Group:MEMS中心

Journal:The 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2023)

Place of Publication:Jeju, Korea

All the Authors:Longqi Ran,Jiangbo He,Zongda Hu,Yichuan Wu,Binlei Cao

Correspondence Author:Wu Zhou

Document Type:C

Page Number:62-65

ISSN No.:2474-3755

Translation or Not:no

Date of Publication:2023-07-31

Date of Publication:2023-07-31

Next One:Multifunctional architected MWCNTs/PDMS composites with high sensing and energy absorption capability inspired by ant tentacle and pomelo peel

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:On the job School/Department:University of Electronic Science and Technology of China E-Mail:

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