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Paper Publications
more+- [1] Xiaohui Zhao. Preparation and thermoelectric characteristics of ITO/PtRh:PtRh thin film thermocouple .Nanoscale Research Letters .2017
- [2] Xiaohui Zhao. Alumina composite coatings with enhanced high-temperature electrical insulating properties on Ni-based superalloy substrates .Ceramics International .2018 ,44 (1) :136-140
- [3] Xiaohui Zhao. Enhanced thermoelectric property and stability of NiCr-NiSi thin film thermocouple on super alloy substrate .Rare Metals .2017 ,36 (6) :512-516
- [4] Xiaohui Zhao,. Effect of nitrogen doping on the thermoelectric properties of ITO-In2O3 thin film thermocouples .Thin Solid Films .2017 ,629 :1-5
- [5] Xiaohui Zhao. Microstructure evolution and thermoelectric property of Pt-PtRh thin film thermocouples .Crystals .2017 ,7 (4) :96
Research Field
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1. 薄膜材料制备
实验室拥有电子束蒸发、磁控溅射、等离子增强化学气相沉积(PECVD)、原子层沉积(ALD)多台薄膜制备设备,并建有万级超净间,能够实现氧化物、金属、半导体多种微纳薄膜材料的可控生长。

电子束蒸发

射频磁控溅射

多靶直流磁控溅射

WKS-300A高温真空加热炉

原子层沉积(ALD)

轮廓仪
2. 薄膜微结构分析与表征
拥有XRD、SEM、TEM、AFM、XPS、Raman多项微结构测试与表征手段

3. 耐高温绝热绝缘涂层
实现了柔性金属衬底、陶瓷衬底的绝缘绝热涂层制备

4. 集成薄膜传感器
薄膜热电偶、薄膜热电阻、薄膜应变计、薄膜气体质量流量传感器、薄膜热流计等多种快响应薄膜传感器的制备与性能表征

主要应用
航空、航天、化工、能源、消费电子等领域


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