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Attenuation of the dielectric charging-induced drift in capacitive accelerometer by AC bias voltage

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Journal:J. Micro/ Nanolith. MEMS MOEMS

All the Authors:Huijun Yu,Peng Peng,Hao Wang,Xiaoping He

First Author:Hao Qu

Correspondence Author:Bei Peng*,Wu Zhou*

Document Code:035002

Volume:16

Issue:3

Translation or Not:no

Date of Publication:2017-08-19

Date of Publication:2017-08-19

Pre One:Consideration of the fringe effects of capacitors in micro accelerometer design

Next One:Effects of dielectric charging on the output voltage of a capacitive accelerometer

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:On the job School/Department:University of Electronic Science and Technology of China E-Mail:

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