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Effects of dielectric charging on the output voltage of a capacitive accelerometer

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Journal:J. Micromech. Microeng.

All the Authors:Huijun Yu,Wu Zhou,Peng Peng,Xiaoping He

First Author:Hao Qu

Correspondence Author:Bei Peng

Document Code:115001

Volume:26

Translation or Not:no

Date of Publication:2016-09-16

Date of Publication:2016-09-16

Pre One:Attenuation of the dielectric charging-induced drift in capacitive accelerometer by AC bias voltage

Next One:Dielectric charging induced drift in micro device reliability-a review

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:On the job School/Department:University of Electronic Science and Technology of China E-Mail:

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