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Analytical study and compensation for temperature drifts of a bulksilicon MEMS capacitive accelerometer

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Journal:Sensors and Actuators A: Physical

All the Authors:Jin Xie,Xiaoping He,Lianming Du,Wu Zhou

First Author:Jiangbo He

Volume:239

Page Number:174–184

Translation or Not:no

Date of Publication:2016-01-07

Date of Publication:2016-01-07

Pre One:Investigation of the Thermal Drift of MEMS Capacitive Accelerometers Induced by the Overflow of Die Attachment Adhesive

Next One:Improving the dynamic performance of capacitive micro‑accelerometer through electrical damping

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:On the job School/Department:University of Electronic Science and Technology of China E-Mail:

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