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Investigation of the Contact Characteristics of Silicon–Gold in an Anodic Bonding Structure
2022-12-28 Hits:Journal:Micromachines
All the Authors:Kaicong Cao,Longqi Ran,Huijun Yu
First Author:Lin Zhang
Correspondence Author:Wu Zhou*
Document Code:264
Volume:2022
Issue:13
Page Number:264(10 pages)
Translation or Not:no
Date of Publication:2022-02-06
Date of Publication:2022-02-06