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MEMS 压力传感器新型膜结构设计与优化
2022-12-28 Hits:Journal:机械设计
All the Authors:张顺星,于慧君,彭倍
First Author:卢鹏
Correspondence Author:周吴*
Volume:39
Issue:3
Page Number:61-67
Translation or Not:no
Date of Publication:2022-03-23
Date of Publication:2022-03-23