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Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study

2022-12-28 Hits:

Journal:IEEE Sensors Journal

All the Authors:Lun Li,Jiangbo He,Bei Peng,Huijun Yu,Xiaoping He

First Author:Peng Peng

Correspondence Author:Wu Zhou*

Volume:23

Issue:1

Page Number:202-210

Translation or Not:no

Date of Publication:2022-12-30

Date of Publication:2022-12-30

Attachments:

Pre One:Traveling wave distortion of MEMS ultrasonic motor induced by anisotropic elasticity

Next One:MEMS 压力传感器新型膜结构设计与优化

周吴

Gender:Male Education Level:With Certificate of Graduation for Doctorate Study Alma Mater:Southwest Jiaotong University Degree:Doctor of Engineering Status:On the job School/Department:University of Electronic Science and Technology of China E-Mail:

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