Background: The piezoelectric microvibratory stage as a microelectromechanical system
(MEMS) actuator can tilt around the X∕Y axis and translate along the Z axis. However, when
the vibratory stage is tilted around the X axis, it also has an undesirable tilting angle around
the Y axis. It means that the X axis tilting and the Y axis tilting are not independent; therefore,
it is significant to eliminate the coupling of two motions.
Aim: The coupling of X∕Y tilting motion is studied theoretically and decoupled by optimization
of structural parameters.
Approach: A structural model was established to analyze the reasons of the X∕Y tilting
coupling. Reasonable structure parameters of L-shaped piezoelectric beam were designed to
eliminate the off-axis errors caused by X∕Y tilting coupling.
Results: The reason of X∕Y tilting coupling is that the stiffness of the L-shaped piezoelectric
support beam mismatch in the X axis and Y axis directions. The appropriate width ratio of the
two segments of the L-shaped piezoelectric beam can reduce the off-axis error effectively.
Conclusions: The test results show that the piezoelectric MEMS vibratory stage can achieve
X∕Y tilting motion with the relative off-axis error only at 1%.