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Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators

2023-03-20 Hits:

Journal:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

All the Authors:L. Qiao,L. Li,Y. Chen

First Author:C. Tu

Correspondence Author:X. Zhang

Translation or Not:no

Date of Publication:2023-03-15

Date of Publication:2023-03-15

Pre One:Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure

Next One:Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes

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