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Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure

2024-08-31 Hits:

Journal:Journal of Micromechanics and Microengineering

Volume:34

Issue:4

Translation or Not:no

Date of Publication:2024-03-01

Date of Publication:2024-03-01

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