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Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator

2024-08-31 Hits:

Journal:Microsystems & Nanoengineering

Volume:10

Issue:58

Translation or Not:no

Date of Publication:2024-05-01

Date of Publication:2024-05-01

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Next One:Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure

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