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Paper Publications
- 2024-08-31
[1] A Bent-TBTF Resonant MEMS Accelerometer using Auxiliary Supporting Beams, IEEE Electron Device Letters,
- 2024-08-31
[2] Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator, Microsystems & Nanoengineering, vol. 10, no. 58, May 2024.
- 2024-08-31
[3] Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure, Journal of Micromechanics and Microengineering, vol. 34, no. 4, Mar 2024.
- 2023-03-20
[4] C. Tu , L. Qiao , L. Li , Y. Chen , and X. Zhang , Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Mar 2023.
- 2022-09-20
[5] C. Tu , M. Yang , Z. Zhang , X. Lv , L. Li , and X. Zhang , Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes, Research, no. 2022, Aug 2022.
- 2020-09-14
[6] C. Tu , J. Lee , and X. Zhang , Dissipation Analysis Methods and Q-Enhancement Strategies in Piezoelectric MEMS Laterally Vibrating Resonators: A Review, Sensors, vol. 20, no. 17, Sep 2020.
- 2019-11-09
[7] C. Tu , Z. Chu , B. Spetzler , P. Hayes , C. Dong , X. Liang , H. Chen , Y. He , Y. Wei , I. Lisenkov , H. Lin , Y. McCord , F. Faupel , E. Quandt , and N. Sun , Mechanical-resonance-enhanced thin-film magnetoelectric heterostructures for magnetometers, mechanical antennas, tunable RF inductors, and filters, Materials, vol. 12, no. 14, Jul 2019.
- 2019-12-27
[8] C. Tu , C. Dong , Z. Chu , H. Chen , X. Liang , and N. Sun , A passive isolator realized by magnetoelectric laminate composites, Applied Physics Letters, vol. 113, no. 26, Dec 2018.
- 2019-12-27
[9] C. Tu , A. Frank , S. Michael , J. Stegner , U. Stehr , M. Hein , and J. Lee , Applying laser Doppler vibrometry to probe anchor losses in MEMS AlN-on-Si contour mode resonators, Sensors and Actuators A: Physical, vol. 263, pp. 188-197, Aug 2017.
- 2019-12-27
[10] C. Tu and J. Lee , Enhancing quality factor by etch holes in piezoelectric-on-silicon lateral mode resonators, Sensors and Actuators A: Physical, vol. 259, pp. 144-151, Jun 2017.
- 2019-12-27
[11] C. Tu and J. Lee , Effects of Cryogenic Cooling on the Quality Factor of Lamb Wave Mode Aluminium Nitride Piezoelectric-on-Silicon MEMS Resonators, Sensors and Actuators A: Physical, vol. 244, pp. 15-23, Jun 2016.
- 2019-12-27
[12] C. Tu and J. Lee , VHF-band biconvex AlN-on-silicon micromechanical resonators with enhanced quality factor and suppressed spurious modes, Journal of Micromechanics and Microengineering, vol. 26, no. 6, Jun 2016.
- 2019-12-27
[13] C. Tu and J. Lee , A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators, Journal of Micromechanics and Microengineering, vol. 25, no. 11, Oct 2015.
- 2019-12-27
[14] C. Tu , H. Zhu , Y. Xu , and J. Lee , Differential-capacitive-input and differential-piezoresistive-output enhanced transduction of a silicon bulk-mode microelectromechanical resonator, Sensors and Actuators A: Physical, vol. 210, pp. 41-50, Apr 2014.
- 2019-12-27
[15] C. Tu and J. Lee , Ambient temperature and bias conditions induced frequency drifts in an uncompensated SOI piezoresistive resonator, Sensors and Actuators A: Physical, vol. 202, pp. 140-146, Nov 2013.
- 2019-12-27
[16] C. Tu and J. Lee , Crystallographic effects on energy dissipation in high-Q silicon bulk mode resonators, Journal of Microelectromechanical Systems, vol. 22, no. 2, pp. 262-264, Apr 2013.
- 2019-12-27
[17] C. Tu and J. Lee , Increased dissipation from distributed etch holes in a lateral breathing mode silicon micromechanical resonator, Applied Physics Letters, vol. 101, no. 2, Jul 2012.
- 2019-12-27
[18] C. Tu and J. Lee , Thermoelastic dissipation in etch-hole filled Lamé bulk-mode silicon microresonators, IEEE Electron Device Letters, vol. 33, no. 3, Mar 2012.
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