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more+- [1] A Bent-TBTF Resonant MEMS Accelerometer using Auxiliary Supporting Beams .IEEE Electron Device Letters
- [2] Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator .Microsystems & Nanoengineering .2024 ,10 (58)
- [3] Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure .Journal of Micromechanics and Microengineering .2024 ,34 (4)
- [4] Investigation on Quasi Lamb Wave Modes in AlN-on-Si MEMS Resonators .IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control .2023
- [5] Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes .Research .2022 (2022)
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涂程
Gender:Male
Education Level:With Certificate of Graduation for Doctorate Study
Degree:Doctor of Engineering
Status:Professor
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